- Trained on our vast library of engineering resources.

Conax Technologies Single-Point Calibration TC for the Barrel Reactor

Description
Conax offers a Single-Point calibration thermocouple designed for use on Applied Materials/Moore Technologies 76XX, 77XX and 78XX Series Epitaxial Barrel Reactors. The Single-Point sensor allows for the calibration of the 3 infrared (IR) sensors used to monitor susceptor temperature during wafer processing. The Single-Point needs to be repositioned in the susceptor to check the calibration of each or the 3 IR sensors. The Single-Point sensors use K-Type thermocouple wire and a Haynes 214 sheath.
Request a Quote

Suppliers

Company
Product
Description
Supplier Links
Single-Point Calibration TC for the Barrel Reactor -  - Conax Technologies
Buffalo, NY, United States
Single-Point Calibration TC for the Barrel Reactor
Single-Point Calibration TC for the Barrel Reactor
Conax offers a Single-Point calibration thermocouple designed for use on Applied Materials/Moore Technologies 76XX, 77XX and 78XX Series Epitaxial Barrel Reactors. The Single-Point sensor allows for the calibration of the 3 infrared (IR) sensors used to monitor susceptor temperature during wafer processing. The Single-Point needs to be repositioned in the susceptor to check the calibration of each or the 3 IR sensors. The Single-Point sensors use K-Type thermocouple wire and a Haynes 214 sheath.

Conax offers a Single-Point calibration thermocouple designed for use on Applied Materials/Moore Technologies 76XX, 77XX and 78XX Series Epitaxial Barrel Reactors.

The Single-Point sensor allows for the calibration of the 3 infrared (IR) sensors used to monitor susceptor temperature during wafer processing. The Single-Point needs to be repositioned in the susceptor to check the calibration of each or the 3 IR sensors. The Single-Point sensors use K-Type thermocouple wire and a Haynes 214 sheath.

Supplier's Site

Technical Specifications

  Conax Technologies
Product Category Thermocouple Temperature Probes
Product Name Single-Point Calibration TC for the Barrel Reactor
Base, Noble and Refractory Metal Type K
Unlock Full Specs
to access all available technical data

Similar Products

High-Temperature Assembly - HTRT - Conax Technologies
Specs
Sensed Temperature -90 to 700 F (-67.78 to 371 C)
Probe Features Available as an Assembly
View Details
Conax Termination – Terminal Barrel with Lead Wire for RTDs (T3) -  - Conax Technologies
Specs
Element Material Copper
Probe Configuration Straight Probe
Diameter or Width Range 0.3750 to 0.5000 inch (9.52 to 12.7 mm)
View Details
Sterimaster® Chamber/Load Sensor Assembly -  - Conax Technologies
Specs
Sensed Temperature -58 to 302 F (-50 to 150 C)
Element Material Platinum
Reference Resistance 100 Ohms (Most Common)
View Details
Sliding Contact Assembly - RT - Conax Technologies
Specs
Sensed Temperature -90 to 500 F (-67.78 to 260 C)
Probe Features Available as an Assembly
View Details