Vaporization technologies were unable to provide a viable solution for the industry until Brooks Instrument introduced its 2nd generation DLI heat exchanger technology, called DLI High Capacity Vaporizer (DLIHV). The DLIHV system offers one of the highest capacity vaporizers in the industry. The 6000W model consistently and reliably delivers water vapor mass flow rates up to ~5 kg/hr (83 g/min). The atomizer design provides a more favorable liquid-to-gas ratio, reducing the flow rate of carrier gas per mass of liquid precursor.
Our proprietary atomizer exponentially multiplies the specific surface area of an inlet fluid by creating millions of sub-10 micron size droplets through the use of a supersonic shock front caused by the rapid expansion of a carrier gas through an orifice. Increasing the fluid's surface area improves the heat transfer efficiency. The 316L stainless steel atomizer, with removable orifice, is a fully serviceable, interchangeable component sized for the desired fluid and mass flow rate.
Features
Water vapor mass flow rates up to ~5 kg/hr (83 g/min)
Heat exchange coils and heating elements cast in aluminum outer shell offer optimal heat transfer efficiency
Wetted materials made from 316L SS (optionally electro-polished, passivated or titanium)
Atomizer generates superfine aerosol droplets (<10µ inch diameter)
Optional design without atomizer for fluids that easily vaporize
Liquid precursor flow rate controlled by inlet liquid mass flow controller
Multiple, configurable vaporizer models
Benefits
Aluminum outer shell delivers:
Homogeneous, stable temperature distribution
Reduced risk of thermal composition of liquid
No liquid carryover into process chamber
Prolonged heat exchanger lifetime
316L SS materials resist corrosion and ensures process cleanliness
Atomizer increases surface area and heat transfer enabling complete vaporization at lower temperatures
Design without atomizer reduces cost of system
Inlet liquid MFC provides rapid response to changing vapor set points provides “vapor-on-demand”
Multiple vaporizer configurations accommodates wide range of liquid properties
Modular design enables easy modification from application to application
Applications
Functional coatings (e.g., TiN, SiC)
Thin-film chemical vapor deposition systems (CVD, ALD) used in semiconductor, fiber optic and industrial coatings
Vaporization technologies were unable to provide a viable solution for the industry until Brooks Instrument introduced its 2nd generation DLI heat exchanger technology, called DLI High Capacity Vaporizer (DLIHV). The DLIHV system offers one of the highest capacity vaporizers in the industry. The 6000W model consistently and reliably delivers water vapor mass flow rates up to ~5 kg/hr (83 g/min). The atomizer design provides a more favorable liquid-to-gas ratio, reducing the flow rate of carrier gas per mass of liquid precursor.
Our proprietary atomizer exponentially multiplies the specific surface area of an inlet fluid by creating millions of sub-10 micron size droplets through the use of a supersonic shock front caused by the rapid expansion of a carrier gas through an orifice. Increasing the fluid's surface area improves the heat transfer efficiency. The 316L stainless steel atomizer, with removable orifice, is a fully serviceable, interchangeable component sized for the desired fluid and mass flow rate.
Features
- Water vapor mass flow rates up to ~5 kg/hr (83 g/min)
- Heat exchange coils and heating elements cast in aluminum outer shell offer optimal heat transfer efficiency
- Wetted materials made from 316L SS (optionally electro-polished, passivated or titanium)
- Atomizer generates superfine aerosol droplets (<10µ inch diameter)
- Optional design without atomizer for fluids that easily vaporize
- Liquid precursor flow rate controlled by inlet liquid mass flow controller
- Multiple, configurable vaporizer models
Benefits
Aluminum outer shell delivers:
- Homogeneous, stable temperature distribution
- Reduced risk of thermal composition of liquid
- No liquid carryover into process chamber
- Prolonged heat exchanger lifetime
- 316L SS materials resist corrosion and ensures process cleanliness
- Atomizer increases surface area and heat transfer enabling complete vaporization at lower temperatures
- Design without atomizer reduces cost of system
- Inlet liquid MFC provides rapid response to changing vapor set points provides “vapor-on-demand”
- Multiple vaporizer configurations accommodates wide range of liquid properties
- Modular design enables easy modification from application to application
Applications
- Functional coatings (e.g., TiN, SiC)
- Thin-film chemical vapor deposition systems (CVD, ALD) used in semiconductor, fiber optic and industrial coatings
