Designed to enable the user to perform their own maintenance and cleaning, the direct liquid inject flange (DLIFS) vaporizer from Brooks Instrument provides indirect vaporization-on-dema
nd for most liquid precursors.
Conventional vaporizers are difficult to start and stop, and often it’s very challenging to determine precisely how much vapor mass is actually being delivered from a conventional vaporizer. Our flanged DLI vaporizers overcome these problems by employing a hot gas, rather than a hot metal surface, to accomplish liquid vaporization. The result is a chemically pure vapor, free of decomposition byproducts or liquid carryover.
Features
Low flow to medium flow, low vapor pressure
Heaters: 200-2500 watts
Designed for fragile liquids like TEMAHf
316L stainless steel modules fastened together using pefluroelastomer or metal seals
Can be disassembled for cleaning and maintenance by user
Start-up service from Brooks
Benefits
Highest purity vapor
Eliminates liquid carryover
Vapor is free of byproducts
Wide range of liquid properties
Generates perfectly mixed vapors
Easy disassembly
Applications
Research and development
Water vaporization for fuel cell stack humidification
Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
Depositing thin films for enhanced thermal, optical or hardness characteristics such as diamond-like carbon coating and glass coating
Vaporizing monomers for vacuum polymer film disposition
Generating calibration vapor
Vaporizing liquid hydrocarbons
Semiconductor thin-films
Designed to enable the user to perform their own maintenance and cleaning, the direct liquid inject flange (DLIFS) vaporizer from Brooks Instrument provides indirect vaporization-on-demand for most liquid precursors.
Conventional vaporizers are difficult to start and stop, and often it’s very challenging to determine precisely how much vapor mass is actually being delivered from a conventional vaporizer. Our flanged DLI vaporizers overcome these problems by employing a hot gas, rather than a hot metal surface, to accomplish liquid vaporization. The result is a chemically pure vapor, free of decomposition byproducts or liquid carryover.
Features
- Low flow to medium flow, low vapor pressure
- Heaters: 200-2500 watts
- Designed for fragile liquids like TEMAHf
- 316L stainless steel modules fastened together using pefluroelastomer or metal seals
- Can be disassembled for cleaning and maintenance by user
- Start-up service from Brooks
Benefits
- Highest purity vapor
- Eliminates liquid carryover
- Vapor is free of byproducts
- Wide range of liquid properties
- Generates perfectly mixed vapors
- Easy disassembly
Applications
- Research and development
- Water vaporization for fuel cell stack humidification
- Liquid precursor vaporization for chemical vapor deposition (CVD), metal oxide chemical vapor deposition (MOCVD), and atomic layer deposition (ALD)
- Depositing thin films for enhanced thermal, optical or hardness characteristics such as diamond-like carbon coating and glass coating
- Vaporizing monomers for vacuum polymer film disposition
- Generating calibration vapor
- Vaporizing liquid hydrocarbons
- Semiconductor thin-films
