Zygo Corporation Single Beam Interferometer (SBI) 6191-0553-01

Description
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.
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Single Beam Interferometer (SBI) - 6191-0553-01 - Zygo Corporation
Middlefield, CT, United States
Single Beam Interferometer (SBI)
6191-0553-01
Single Beam Interferometer (SBI) 6191-0553-01
These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets. ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

These single-axis interferometers will accommodate input beams up to 8 mm in diameter, for plane mirror or retro-reflector targets.

ZYGO's high performance High Stability Plane Mirror Interferometer (HSPMI) is shown at the right. It is vacuum compatible, and has a primary-to-secondary beam parallelism of 3 arc seconds: the best beam parallelism of all ZYGO's interferometers.

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Technical Specifications

  Zygo Corporation
Product Category Interferometers
Product Number 6191-0553-01
Product Name Single Beam Interferometer (SBI)
Resolution 0.31 nm (3.1 Å)
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