The CFD Pump is a highly accurate pneumatic metering pump capable of 1% repeatability (which translates into efficient use of chemistry and fast replenishment without overshoot). PTFE and PFA wetted parts ensure process purity, as does an integral leak detection sensor. Suction and discharge double ball check valves reduce the number of fittings associated with external valving and make installation easy. Integration with existing process controllers is simple; dedicated controllers are available. Design includes optical position sensor and integral leak sensor.