Servoflo Corporation Datasheets for Flow Meters
Flow meters (flowmeters) and flow sensors are devices used for measuring the flow rate or quantity of a moving fluid or gas.
Flow Meters: Learn more
Product Name | Notes |
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MF5000 MEMS Mass Flow Meter | MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in... |
AM1000 Series MEMS Environmental Meter | The AM1000 Series is designed for air velocity measurement in a closed conduit or open space, with optional temperature and humidity sensing data (AM1100 model). The sensing elements are made... |
FS1015 CL Mass Flow Sensors | The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and... |
FS4003/4008 Mass Flow Sensors | The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors... |
FS4001 MEMS Mass Flow Sensor | The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to... |
FS5001B MEMS Mass Flow Sensor for Manifold Mounting | The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to... |
FS6122 Bi-Directional Medical Respiratory Sensor | The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output. A gauge pressure sensor is integrated into the... |
FS7002 Mass Flow/Filter Clog Sensor | The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter. |
FS8001/FS8003 Small Mass Flow Sensor | The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog... |
MF4000 Mass Flow Meter | The MF4000 Series Mass Flow Meters are designined for applications in gas flow within a flow channel diameter of 3 mm or 8 mm. Plastic finishing with an easy change... |
MF4600 Gas Flow Sensor for Metering & Control | The MF4600 Series mass flow meters are made with Siargo's proprietary MEMS sensing technology. It applies or clean and dry gas metering and control. The meter is designed with the... |
MF5100 MEMS Mass Flow Meter | The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options... |
MF5200 Oxygen Mass Flow Meter | The MF5200 Series oxygen flow meters are designed specifically for oxygen metering systems in medical equipment. These meters are operated with the standard industrial user interfaces (RS485), and user-defined alarm... |
MF5600 MEMS Mass Flow Meter | The MF5600 mass flow meters are designed for general purpose yet precise industrial gas measurement, monitoring or control. The design is for applications where the display must be placed separately... |
MF5700 MEMS Mass Flow Meter | The MF5700 mass flow meters come in 2 models. The MF5706 has a flow range of 0-10 SLPM or 0-25 SLPM. The MF5712 has a range of 0-200 SLPM. The... |
MFG Mass Flow Meters | The MFG Series mass flow meters are powered by battery and offer a wide dynamic range while mainiting the high sensitivity at low flows for gas monitoring and measurement. The... |