Servoflo Corporation Datasheets for Flow Meters

Flow meters (flowmeters) and flow sensors are devices used for measuring the flow rate or quantity of a moving fluid or gas.
Flow Meters: Learn more

Product Name Notes
MF5000 MEMS Mass Flow Meter MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in...
AM1000 Series MEMS Environmental Meter The AM1000 Series is designed for air velocity measurement in a closed conduit or open space, with optional temperature and humidity sensing data (AM1100 model). The sensing elements are made...
FS1015 CL Mass Flow Sensors The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and...
FS4003/4008 Mass Flow Sensors The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors...
FS4001 MEMS Mass Flow Sensor The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to...
FS5001B MEMS Mass Flow Sensor for Manifold Mounting The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to...
FS6122 Bi-Directional Medical Respiratory Sensor The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output. A gauge pressure sensor is integrated into the...
FS7002 Mass Flow/Filter Clog Sensor The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter.
FS8001/FS8003 Small Mass Flow Sensor The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog...
MF4000 Mass Flow Meter The MF4000 Series Mass Flow Meters are designined for applications in gas flow within a flow channel diameter of 3 mm or 8 mm. Plastic finishing with an easy change...
MF4600 Gas Flow Sensor for Metering & Control The MF4600 Series mass flow meters are made with Siargo's proprietary MEMS sensing technology. It applies or clean and dry gas metering and control. The meter is designed with the...
MF5100 MEMS Mass Flow Meter The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options...
MF5200 Oxygen Mass Flow Meter The MF5200 Series oxygen flow meters are designed specifically for oxygen metering systems in medical equipment. These meters are operated with the standard industrial user interfaces (RS485), and user-defined alarm...
MF5600 MEMS Mass Flow Meter The MF5600 mass flow meters are designed for general purpose yet precise industrial gas measurement, monitoring or control. The design is for applications where the display must be placed separately...
MF5700 MEMS Mass Flow Meter The MF5700 mass flow meters come in 2 models. The MF5706 has a flow range of 0-10 SLPM or 0-25 SLPM. The MF5712 has a range of 0-200 SLPM. The...
MFG Mass Flow Meters The MFG Series mass flow meters are powered by battery and offer a wide dynamic range while mainiting the high sensitivity at low flows for gas monitoring and measurement. The...