The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.

Pressure Insensitive
A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.

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• Multi Gas / Multi Range function
  The gas type and full scale flow rate can be changed by the customer
• Variable PID function gives high speed response (within 1 second) across the whole flow range
• Compact gas line
  There is no need for a regulator, transducer and filter
• Stable control of the gas flow without effect by upstream and downstream pressure fluctuations
• Integrated Inlet Pressure Sensor
• On board Multi display
• Warranty 1% Set Point high accuracy
• Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
• Compact size
  Same fitting to fitting dimension up to 50 SLM
• Signal compatibility
  Analog/RS485 Digital Model , DeviceNet™ Model
• Network function
  Controlled by digital signal.