The Nano-UHV200 is a three axis UHV compatible piezo nanopositioning system constructed from titanium and 316 stainless steel. Made entirely from non-magnetic UHV compatible materials, the Nano-UHV200 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 2 inch x 2 inch center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.
- UHV compatible piezo nanopositioner
- Three axis (XYZ)
- 200 μm x 200 μm x 200 μm motion
- Bakeable to 100° C
- Titanium and 316SS construction
- Closed loop PicoQ® control