The CHARON2 platforms are built on a robust, reliable and elegantly stacked architecture, designed with modularity and scalability principles in mind. They start from a standalone X axis and can be extended to a complete motion system of up to 7 axes. Datasheets performance are available with different electronics configurations.
Their compatibility with current and future modules and options allows coverage of the broadest application space and use cases. These flexible, scalable, modular and upgradeable platforms offer an entry level to all semiconductor applications and many use cases of other markets, for instance medical, pharmaceutical, material science and others.
Continuously evolving in all served markets, CHARON2 supports OEM's product lifetime extension as well as upgrade paths. Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics sustains applications development in all technology and industry fields.
CHARON2 XY specifications
Total stroke: 475 mm for X (bottom axis) and 410 mm for Y (top axis)
Position accuracy: ±1 µm for both X (bottom axis) and Y (top axis)
Position stability: ±2 nm for both X (bottom axis) and Y (top axis)
Bidirectional repeatability: ±0.4 µm for both X (bottom axis) and Y (top axis)
CHARON2 Stacked Platforms characteristics
Total stroke : up to 650 mm x 410 mm
Available in 9 standards x 2 electronics = 18 configurations as off-the-shelf products
Compact footprint
Payload up to 30 Kg
Included options and features: rails particle suction (ETEL patent), custom signals, pneumatic lines, and more
ISO1 clean room compatibility
Tip-Tilt correction with the Z3TM combined module
Built-in vacuum supply at chuck level
Short move and settle times
The CHARON2 platforms are built on a robust, reliable and elegantly stacked architecture, designed with modularity and scalability principles in mind. They start from a standalone X axis and can be extended to a complete motion system of up to 7 axes. Datasheets performance are available with different electronics configurations.
Their compatibility with current and future modules and options allows coverage of the broadest application space and use cases. These flexible, scalable, modular and upgradeable platforms offer an entry level to all semiconductor applications and many use cases of other markets, for instance medical, pharmaceutical, material science and others.
Continuously evolving in all served markets, CHARON2 supports OEM's product lifetime extension as well as upgrade paths. Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics sustains applications development in all technology and industry fields.
CHARON2 XY specifications
- Total stroke: 475 mm for X (bottom axis) and 410 mm for Y (top axis)
- Position accuracy: ±1 µm for both X (bottom axis) and Y (top axis)
- Position stability: ±2 nm for both X (bottom axis) and Y (top axis)
- Bidirectional repeatability: ±0.4 µm for both X (bottom axis) and Y (top axis)
CHARON2 Stacked Platforms characteristics
- Total stroke : up to 650 mm x 410 mm
- Available in 9 standards x 2 electronics = 18 configurations as off-the-shelf products
- Compact footprint
- Payload up to 30 Kg
- Included options and features: rails particle suction (ETEL patent), custom signals, pneumatic lines, and more
- ISO1 clean room compatibility
- Tip-Tilt correction with the Z3TM combined module
- Built-in vacuum supply at chuck level
- Short move and settle times
