Linear Slides and Linear Stages from ETEL S.A.

Multi-axis Positioning System -- ZT Box


 
 
Multi-axis Positioning System -- ZT Box -- View Larger Image
Multi-axis Positioning System -- ZT Box-Image
ASME-NNNN-03-0012-0004xx-ZT combined module

The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc.

Characteristics

  • Infinite rotation
  • Built-in vacuum supply at wafer chuck level
  • Built-in gravity compensator
  • ISO1 clean room compatible thanks to vacuum suction
  • Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment
  • Version without a coarse Z can be done
  • Very good Z jitter as well as move and settle
Main features

  • Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T
  • Position accuracy: ±0.6 µm for Z and ±3 arcsec for T
  • Speed up to: 0.1 m/s for Z and 15.7 rad/s for T
  • Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T
  • Position stability: ±5 nm for Z and ±0.2 arcsec for T
  • Load capacity: 1 kg


Product Category
Linear Slides and Linear Stages
Axis Configuration
Z Axis Only

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Z-Axis Travel
 
Rated Speed
 
Device Type
 
Features