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ASME-NNNN-03-0012-0004xx-ZT combined module
The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc.
Built-in vacuum supply at wafer chuck level
Built-in gravity compensator
ISO1 clean room compatible thanks to vacuum suction
Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment
Version without a coarse Z can be done
Very good Z jitter as well as move and settle
Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T
Position accuracy: ±0.6 µm for Z and ±3 arcsec for T
Speed up to: 0.1 m/s for Z and 15.7 rad/s for T
Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T
Position stability: ±5 nm for Z and ±0.2 arcsec for T