High Spatial Frequency Roughness (HSFR) <1 Å rms over spatial periods of 10 nm to 1 mm
ZYGO's Super Finishing process produces extremely smooth surfaces over a wide power spectral density (PSD) band on materials such as fused silica, sapphire, YAG, etc. Our unique process (also known as Super Polishing) is capable of producing a surface roughness of < 1 Angstrom (< 0.1 nm), over spatial periods ranging from 10 nm to 1 mm.
This Super Finishing process can be accomplished on any size optic that we process, all the way up to meter-class optics. Super Finishing is most often performed on plano optics, like windows and mirrors, but can also be done on spherical or aspherical surfaces.
Why Super Finishing?
Super Finished surfaces are often required for applications where it is critical to reduce the scattering of light as it passes through the surface of an optic. This is especially important in applications using short wavelengths (such as X-ray optics), photolithography (especially EUV lithography), Fabry-Perot etalons, and instruments for high-performance telescopes, among many other applications.