KLA Corporation Datasheets for Surface Metrology Equipment
Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
Surface Metrology Equipment: Learn more
| Product Name | Notes |
|---|---|
| HRP-250 | The HRP-250 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 200mm applications. This surface topography metrology tool's ultra-fine 20nm stylus... |
| HRP-350 | The HRP-350 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 300mm applications. This surface profile measurement tool's ultra-fine 20nm stylus... |
| MicroXAM - 100 | The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profiling solution focusing on the needs of the engineering and research community. Our 3D surface profiler products... |