KLA Corporation Datasheets for Surface Metrology Equipment

Surface metrology equipment is used to measure the surface finish and/or geometry of engineering components. Surface texture and topology characteristics include surface roughness, contour, form, waviness, and defects.
Surface Metrology Equipment: Learn more

Product Name Notes
HRP-250 The HRP-250 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 200mm applications. This surface topography metrology tool's ultra-fine 20nm stylus...
HRP-350 The HRP-350 is an automated, advanced surface topography metrology tool, featuring high resolution/high-aspect ratio, stylus-based surface profiling for leading edge 300mm applications. This surface profile measurement tool's ultra-fine 20nm stylus...
MicroXAM - 100 The KLA-Tencor Development Series of 3D surface profilers offer a complete optical surface profiling solution focusing on the needs of the engineering and research community. Our 3D surface profiler products...