MEMS Foundry
Service Detail from Merit Sensor Systems




For over 25 years we have been supplying customers with accurate and reliable piezoresistive MEMS pressure sensors. Here’s a quick recap of our history:
In 1991 Fred Lampropoulos, Chairman and CEO of Merit Medical Systems, founded Sentir Semiconductor. The company’s first pressure sensor was qualified for production in 1993, and in 1997 the company’s annual sensor sales surpassed 1 million.
In 1999 Sentir Semiconductor was vertically integrated with Merit Medical, and in 2002 the name Sentir Semiconductor was changed to Merit Sensor Systems. In 2004 the building of a new and improved facility on the Merit Medical campus commenced, including a class 100 (ISO 5) cleanroom for wafer fabrication, commonly known in the industry as a fab.
Today, Merit Sensor continues to provide pressure sensors to its parent company. However, Merit Sensor serves many other customers from various industries around the world. With its own wafer fab and calibration equipment on site, Merit Sensor has been able to support a wide variety of market demands.
Whether the industry be transportation, industrial, medical, aerospace, or consumer, Merit Sensor provides products for accurate and reliable measurement of pressure.
CapabilitiesWe design and manufacture piezoresistive pressure sensors (a type of MEMS) that measure pressure from 0 to 15,000 psi in sensing environments from -40 to 150 °C. Our sensors are available in absolute, gage, vacuum, and diferential configurations.
We also design and manufacture packaged pressure sensors for integration into the various applications of our customers. Some examples of our packaged sensors are the fully compensated TR Series, ideal for mass production in the automotive industry; the passively compensated BP Series, ideal for the room-temperature environment of medical devices; and the uncompensated RS Series, ideal for soldering and later calibrating on a control board.
In addition to our standard products designed for various applications, we also customize products to meet the specific needs of our customers (e.g., sensitivity, resistance, calibration). If the requirements are feasible and the NRE payment is sufficient, we will work closely with those customers who require a customized sensor.
Having a fab on site allows us to ensure high quality.* All of our products are RoHS and REACH compliant and AEC-Q100 compliant. But even if issues do arise, we are committed to quality and customer service. We will provide our customers with solutions.
*Mission Statement: Merit Sensor Systems will design and manufacture quality products, specifically silicon-based sensors and micromachined components for the OEM and private label market. This will be accomplished by market focus, education, innovation, quality, and service.