Servoflo Corporation Datasheets for Mass Flow Meters and Controllers

Mass flow meters and controllers measure flow rate in units of mass or volume per units of time (e.g., pounds per minute). They are designed for use with gases, liquids, steams, or slurries. 
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Product Name Notes
MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in...
The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and...
The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors...
The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to...
The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to...
The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output. A gauge pressure sensor is integrated into the...
The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter.
The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog...
The MF4000 Series Mass Flow Meters are designined for applications in gas flow within a flow channel diameter of 3 mm or 8 mm. Plastic finishing with an easy change...
The MF4600 Series mass flow meters are made with Siargo's proprietary MEMS sensing technology. It applies or clean and dry gas metering and control. The meter is designed with the...
The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options...
The MF5200 Series oxygen flow meters are designed specifically for oxygen metering systems in medical equipment. These meters are operated with the standard industrial user interfaces (RS485), and user-defined alarm...
The MF5600 mass flow meters are designed for general purpose yet precise industrial gas measurement, monitoring or control. The design is for applications where the display must be placed separately...
The MF5700 mass flow meters come in 2 models. The MF5706 has a flow range of 0-10 SLPM or 0-25 SLPM. The MF5712 has a range of 0-200 SLPM. The...
The MFG Series mass flow meters are powered by battery and offer a wide dynamic range while mainiting the high sensitivity at low flows for gas monitoring and measurement. The...
The PMF83000 features Posifa's third-generation flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by...
The PMF86000 Series is Gen II mass airflow sensors are designed for respiratory care and other medical & instrumentation applications. These sensors are parylene-coated. Bi-directional versions available. The entire sensor...