Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance.
Semiconductor Processing Components
CoorsTek is your partner for custom advanced ceramic components and assemblies to support higher throughput and better yields in your semiconductor processing equipment,
Our materials experts are ready to work with you to develop the optimal right solution for your wafer handling, heating, and processing requirements.
Made from Quality Engineered Ceramics
Engineered ceramics make semiconductor components cleaner, more durable, more effective. Let us help you choose the best semiconductor-grade material for your application:
- Aluminas (Al2O3)
- Aluminum Nitride (AlN)
- Graphite / Carbon (C)
- Quartz (SiO2)
- Silicon Carbides (SiC)
- Yttria (Y2O3)