KLA Corporation Datasheets for Thin Film Monitors
Thin film monitors are used to analyze and/or control thin film deposition rate, composition and properties.
Thin Film Monitors: Learn more
|Aleris Family -- 8350||The Aleris 8350 is a high-performance film metrology tool that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film...|
|Aleris Family -- 8330||The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry...|