KLA Corporation Datasheets for Thin Film Monitors

Thin film monitors are used to analyze and/or control thin film deposition rate, composition and properties.
Thin Film Monitors: Learn more

Product Name Notes
Aleris Family -- 8350 The Aleris 8350 is a high-performance film metrology tool that meets the tighter process tolerances required for thickness, refractive index and stress measurements on critical films. The Aleris 8350 film...
Aleris Family -- 8330 The Aleris Family of film metrology tools provides reliable and precise measurement of film thickness, refractive index, stress and composition for the 32nm node and beyond. Utilizing Broadband Spectroscopic Ellipsometry...