Hexoloy SG, a variant of silicon carbide containing graphitic carbon, is electrically conductive and can be readily DC magnetron sputtered. Silicon carbide thin film coatings are optically transparent, abrasion and corrosion resistant, temperature stable, and have excellent adhesion on a variety of substrates. Applications include optical data and magnetic hard disks, hard protective coatings on flat glass, and conductive or vapor barrier coatings.