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The SP80 and SP80H quill-mounted scanning probes provide class-leading scanning performance, as well as the most flexible use of long styli for maximum productivity.
The SP80 mounts to standard vertical quills and can carry styli up to 500 mm long and 500 g mass, including star configurations. Whereas the SP80H mounts to a horizontal quill and can carry styli up to 200 mm long and 500 g mass, including star configurations.
The SP80 and SP80H probes both use the same design concepts. They are a passive scanning probe that uses digital scale and readheads with 20 nm resolution. These provide exceptional scanning performance, even with long styli.
Kinematic stylus changing with SH80 allows for repeatable re-location of the stylus, optimises stylus arrangements for each feature, and overcomes the need for re-qualification. Fitment of the SH80K allows the probe to be powered on and off without needing to be rehomed on power up.
For more details, refer to the SP80 Technical Paper.