Series of XY scanning stages with large 100 by 100 mm2 aperture and
variable travel range selection principal per axis
with a motion range of 24 microns up to 700 microns
- VTRselect- Concept "Variable-Travel-Range selection" per axis
- extremely flat design for microscopy (height of 15 mm)
- universal stage inserts for microscopy application
- XY-motion up to 700 µm
- bi-directional actuating nanoX® design for high dynamic range
- central aperture 100x100 mm2
- microscopy / lithography
- nanopositioning and scanning
- materials research
- wafer handling and mask alignment
- semiconductor testing equipment
The PXY AP series offers a unique solution for ultra-low profile (height of only 15mm) and high dynamic scanning stages. The key feature is the â€œVTRselect - Concept" (Variable-Travel-Range selection) which allows the user to pre-select a different motion range for each axis. This is useful for a variety of applications, particularly for line scanning applications where long travel ranges are mostly only required in one axis and the second axis is used for high precision alignment. By selecting the travel range according to the required range of motion, the best dynamic properties for each axis can be selected! With the use of this element, scanning systems can be tailored for individual applications.
Integrated high resolution capacitive feedback systems guarantee absolute and repeatable position stability under closed loop. Settling time in the microsecond range and real-time overshoot control are additional advantages of this new technology.
The flat stage profile in combination with the large free aperture allows it to be easily integrated into optical microscopes. In combination with the well known series of objective focusing devices, MIPOS, piezosystem jena offers a solution ideal for the demands of all types of microscopy applications, standard or inverted.
An additional stage insert is available (part no. T-240-99) which can be used to hold 3 inch standard slides, Petri dishes, Lab-Tekâ„¢-Holder and PH2-Incubators.
The piezosystem jena stages work within a voltage range of -20 to +130 V. For controlling, the analogue ENV nanoX amplifier series (connector configuration LEMO/ODU) or the stand alone 30V300 nanoX amplifier series can be used. The d-Drive amplifier series with integrated ASI â€" function (connector configuration D-Sub 15) is well suited for full digital control.
Vacuum and cryogenic versions are available upon request, as well special designs made of Titanium or Invar.