- accurate parallel motion by parallelogram design
- kHz resonant frequency
- version with positioning sensor available
- motion without mechanical play because of solid state hinges
The actuators PZ 8 D12 and 20 D12 have been developed as additional elements for the PXY D12 series and are a special modification of the PZ translation stages. Travel in the z-direction of 8 µm and 20 µm, respectively, is provided.
These elements have a basic, frugal design without a bottom or base plate and are very easy to combine with other systems. These elements can be equipped with positioning feedback sensors for closed loop control. Vacuum and cryogenic versions are available as well.