3D piezo positioning system
- highly compact design results in superior performance
- accurate parallel motion by parallelogram design
- high reliability due to solid state hinges
- motion without mechanical play
- high resolution in nm and sub-nm range
- motion up to 100 µm
- precision pin holes
piezosystem jena´s unique TRITOR 100 is extremely compact but offers motion of up to 100 µm in all three axes. Parallel motion is achieved without play due to the mechanical design. As an option, integrated strain gauge measurement systems for overcoming the effect of hysteresis are available.
TRITOR 100 elements are well suited for many various applications reaching from optical research to OEM systems.