3D piezo positioning system
- highly compact design results in superior performance
- accurate parallel motion by parallelogram design
- high reliability due to solid state hinges
- motion without mechanical play
- high resolution in sub-nm range
- motion up to 9 µm
piezosystem jena´s unique microTRITOR elements are extremely compact but offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 9 µm in all three axes can be realized. The resolution is in the sub-nm range. microTRITOR elements can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to their design, TRITOR elements are suitable for dynamic applications.