Wafer and Thin Film Instrumentation from Zygo Corporation

Packaging Metrology System -- APM650™

 
 
Packaging Metrology System -- APM650™ -- View Larger Image
Packaging Metrology System -- APM650™-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
Monitor or instrument
Mounting / Loading
Manual loading
Technology
Interferometer
Applications
Wafer
Measurements
 
Wafer / Part Size
 
Features
 
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