Wafer and Thin Film Instrumentation from KLA Corporation

AIT XUV™

 
 
AIT XUV™ -- View Larger Image
AIT XUV™-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Optical / Imaging; UV Illumination Laser Scanning
Applications
Photolithography
Measurements
 
Wafer / Part Size
 
Features