The RS-100 resistivity measurement system is a production worthy tool used in nearly all fabs worldwide. This resistivity measurement system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers.
- Accurate and repeatable resistivity measurements to 1mm from the conductive film edge gives enhanced performance for both 200mm and 200mm wafers
- Patented temperature compensation provides the accuracy, long-term repeatability, and system-to-system/fab-to-fab matching for today's production requirements
- Powerful, easy to use Windows NT-based software enables true multi-tasking