Wafer and Thin Film Instrumentation from KLA Corporation

SensArray -- 1535

 
 
SensArray -- 1535 -- View Larger Image
SensArray -- 1535-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
In-process, in-situ or system mounted
Technology
ThermaBond Thermocouple Technique
Applications
Wafer; CVD / PVD; Etching
Measurements
 
Wafer / Part Size
 
Features