Wafer and Thin Film Instrumentation from KLA Corporation

Surfscan -- SP1DLS

 
 
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Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Optical / Imaging; Dual Laser Illumination
Applications
Wafer
Measurements
 
Wafer / Part Size
 
Features