Wafer and Thin Film Instrumentation from KLA Corporation

SpectraFx 100

 
 
SpectraFx 100 -- View Larger Image
SpectraFx 100-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Ellipsometer; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
Applications
Wafer; CVD / PVD
Measurements
 
Wafer / Part Size
 
Features