Wafer and Thin Film Instrumentation from KLA Corporation

SensArray -- 2050

 
 
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SensArray -- 2050-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
In-process, in-situ or system mounted
Technology
ThermaBond Thermocouple Technique
Applications
Wafer; CVD / PVD; Etching
Measurements
 
Wafer / Part Size
 
Features