Wafer and Thin Film Instrumentation from KLA Corporation

SensArray -- 1630

 
 
SensArray -- 1630 -- View Larger Image
SensArray -- 1630-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
In-process, in-situ or system mounted
Technology
ThermaBond Thermocouple Technique
Applications
 
Measurements
 
Features