Wafer and Thin Film Instrumentation from KLA Corporation

Integrated Wafer Processes

 
 
Integrated Wafer Processes -- View Larger Image
Integrated Wafer Processes-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
Sensor or sensing element
Mounting / Loading
In-process, in-situ or system mounted
Technology
Up to 65 IC MicroDie Temperature Sensors
Applications
Wafer
Measurements
 
Wafer / Part Size
 
Features