Wafer and Thin Film Instrumentation from KLA Corporation

Surfscan SP2

 
 
Surfscan SP2 -- View Larger Image
Surfscan SP2-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Optical / Imaging; UV Laser Technology
Applications
Wafer
Measurements
 
Wafer / Part Size
 
Features