Wafer and Thin Film Instrumentation from KLA Corporation

Starlight™ SL3 UV Series

 
 
Starlight™ SL3 UV Series -- View Larger Image
Starlight™ SL3 UV Series-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
Monitor or instrument
Mounting / Loading
Floor
Technology
Optical / Imaging; UV Illumination
Applications
 
Measurements
 
Features