Wafer and Thin Film Instrumentation from KLA Corporation

Resistivity Mapping System -- RS-200

 
 
Resistivity Mapping System -- RS-200 -- View Larger Image
Resistivity Mapping System -- RS-200-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Resistance probe - four-point or SRP
Applications
Wafer
Measurements
 
Wafer / Part Size
 
Features