The RS-200 resistivity mapping system based on proven industry resistivity mapping standards provides accurate and reliable sheet resistance measurement for 45 nm and beyond. This resistivity mapping system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers.
- The resistivity mapping system's accurate and repeatable resistivity measurements to 1mm from the conductive film edge provides enhanced performance for both 200mm and 300mm wafers
- Patented temperature compensation provides the accuracy, long-term repeatability, and system-to-system/fab-to-fab matching for today's production requirements
- The RS-200 resistivity mapping system includes easy-to-use software based on the Windows XP operating system, enabling faster recipe set-up and data analysis