Wafer and Thin Film Instrumentation from KLA Corporation

SpectraCD-XTR

 
 
SpectraCD-XTR -- View Larger Image
SpectraCD-XTR-Image

Specifications

Product Category
Wafer and Thin Film Instrumentation
Form Factor
ProbingSystem
Mounting / Loading
Floor
Technology
Ellipsometer; Profilometer or AFM; Spectrometer (SIMS, XRF, FTIR, DLTS, AAS)
Applications
 
Measurements
 
Features