MEMS Processing Equipment from Leybold USA Inc.

Multi-purpose Vacuum Box Coating Systems -- UNIVEX 400

 
 
Multi-purpose Vacuum Box Coating Systems -- UNIVEX 400 -- View Larger Image
Multi-purpose Vacuum Box Coating Systems -- UNIVEX 400-Image

Specifications

Product Category
MEMS Processing Equipment
Type
Batch; Free Standing System
Process
Physical Vapor Deposition; Resistance Evaporation (optional feature); DC Magnetron Sputtering (optional feature); Ion Beam Assisted Deposition (optional feature)
Applications
MEMS; Optical Coatings; Photovoltaic or solar cell; Semiconductors
Materials Processed
Metal; Polymer; Gallium Arsenide or Compound Semiconductors
Chamber Size
420 mm X 550 mm X 480 mm
Facilities Required
 
Vacuum / Pressure Range
 
High Vacuum Type
 
Features