The control valve can be furnished as an integral part of a mass flow controllers, a pressure controller, or as a separate component. It is a proportional, electro magnetic control valve with extremely fast and smooth flow control characteristics. With reference to the specific fields of application there are different series of unique Bronkhorst High-Tech control valves.
These are patented 2-phase control valves for applications with high (differential) pressures, up to 700 bar! The flow control section is the valve module as described above. The other section is a pressure compensation valve; the latter maintains a constant pressure difference across the first section of 4 bar. By doing so both the inlet pressure and the outlet pressure may change without having any impact on the Vary-P valve function.