Thin Film Equipment from Leybold USA Inc.

Cluster Tool Systems -- UNIVEX C

 
 
Cluster Tool Systems -- UNIVEX C -- View Larger Image
Cluster Tool Systems -- UNIVEX C-Image

Specifications

Product Category
Thin Film Equipment
Type
Free Standing System; Cluster Tool
Process
Physical Vapor Deposition; Resistance Evaporation (optional feature); Electron Beam Evaporation (optional feature); DC_Sputter (optional feature); RF_Sputter (optional feature); Multiple Processes; Vacuum Etching
Applications
Semiconductors
Materials Processed
Metal; Polymer
Chamber Size
 
Vacuum / Pressure Range
 
High Vacuum Type
 
Features
 
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