- symmetrical motion of two slit edges
- driven by only one piezo actuator
- opening up to 300 µm
- nm precise resolution
- vacuum compatible version
- optional measurement system
- vacuum systems
- optical switches
- shutters and scanners
Two slit edges are driven by only one piezoelectric actuator. Solid state flexure hinges were used to construct the PZS 4 element in order to ensure synchronization of the slit edges with respect to the center line.
To avoid hysteresis, creep, and temperature effects, the piezoelectric slit can be equipped with a strain gauge measurement system. The positioning accuracy of the piezo slit with integrated measurement system is typically 0.1% or better.
Piezo slit elements with steel slit edges are also available (please order slit edges seperately). Almost all PZS elements are available in UHV compatible versions and with different body and slit edge materials (INVAR).