KLA Corporation Datasheets for Electron Microscopes

Electron microscopes use a focused beam of electrons instead of light to "image" the specimen and gain information as to its structure and composition.
Electron Microscopes: Learn more

Product Name Notes
eDR-5210
eDR-5210S
KLA-Tencor’s eDR-52xx wafer defect review systems capture high resolution images of wafer defects detected by inspection tools. These images enable defect classification, helping chipmakers to identify systematic defect sources and...