KLA Corporation Datasheets for Electron Microscopes
Electron microscopes use a focused beam of electrons instead of light to "image" the specimen and gain information as to its structure and composition.
Electron Microscopes: Learn more
|KLA-Tencor’s eDR-52xx wafer defect review systems capture high resolution images of wafer defects detected by inspection tools. These images enable defect classification, helping chipmakers to identify systematic defect sources and...|