The MSA-500 Micro System Analyzer is the premier measurement technology for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS (Micro-Electro-Mechanical Systems) devices. By fully integrating a microscope with Scanning Laser-Doppler Vibrometry, Stroboscopic Video Microscopy and White Light Interferometry, the MSA-500 is designed with an all-in-one combination of technologies that clarifies real microstructural response and topography. Incorporated in the MEMS design and test cycle, the MSA-500 provides precise 3-D dynamic and static response data that simplifies troubleshooting, enhances and shortens design cycles, improves yield and performance, and reduces product cost.