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3D Optical Surface Profiler with Sub-Nanometer Precision, ZeGage™ Plus 3D Optical Surface Profiler, NewView™ 8000 Series 3D Optical Surface Profiler, ZeGage™ Micro Lens Process Metrology System
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Part Number Compass™
Supplier Zygo Corporation Zygo Corporation Zygo Corporation Zygo Corporation
Measurement Capability Area or three dimensional profile Area or three dimensional profile Area or three dimensional profile Area or three dimensional profile
Mounting / Loading Options Benchtop Benchtop Benchtop Floor
Surface Profilometers from Zygo Corporation

3D Optical Surface Profiler, ZeGage™

3D Optical Surface Profiler, ZeGage™ -- View Larger Image
3D Optical Surface Profiler, ZeGage™-Image

Specifications

Product Category
Surface Profilometers
Measurement Capability
Area or three dimensional profile
Mounting / Loading Options
Benchtop