Pressure Controllers from HORIBA Instruments, Inc.
Wafer Back Side Cooling Pressure Controller -- GR-300 Series
The GR-300 Series can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system.
The stability and accuracy of the GR-300 makes it ideal for controlling the flow of Helium and Argon in wafer cooling systems.
- Pressure control with more stability and accuracy
- Mass flow sensor (Option)
- Compatible for various fitting
- RoHS compliance
Application example
In the below example, the GR-300 Series is controlling the gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system.
Specifications
Product Category
Pressure Controllers
Form Factor
Stand-Alone
More Information
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