- Large center aperture 40 to 150 mm
- Integrated encoder up to 0.25 arc-sec
Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership.
Compact package and Superior design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.
Brushless Direct Drive maximizes positioning performance Planar ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance.
Accurate Positioning is assured with 18,000 lines encoder that results in 0.072 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.
|Semiconductor assembly||Electronics assembly|
|Precision machine tools||Robotic handlers|