KLA Corporation Datasheets for Digital and Video Microscopes

Digital and video microscopes are instruments that use digital technology to magnify images of objects. They include built-in cameras and a series of high-powered lenses that provide superior image quality and resolution.
Digital and Video Microscopes: Learn more

Product Name Notes
eDR-5210
eDR-5210S
KLA-Tencor’s eDR-52xx wafer defect review systems capture high resolution images of wafer defects detected by inspection tools. These images enable defect classification, helping chipmakers to identify systematic defect sources and...