• Efficient:
  cost-effective, long uptime, energy-efficient
• Easy servicing:
  long service intervals
• Reliable:
  operationally reliable
• Flexible:
  application-oriented
• Quiet:
  sound level < 62 dB(A)

The COBRA BC 1000 F and BC 2000 F are two dry screw vacuum pumps from the proven COBRA BC series. Their fast pumping speed and high hydrogen throughput make them ideal for all demanding processes involved in the production of photovoltaic cells, flat screens and semiconductors. COBRA vacuum pumps are oil-free and noncontacting, allowing powder- and particle laden media to be evacuated.

The COBRA BC 1000 F and BC 2000 F feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.

The COBRA BC 1000 F and BC 2000 F are fitted with highly efficient motors featuring a stand-by mode, thus offering optimum energy-saving potential.

Their compact construction requires very little space, and their extremely low energy requirements keep operating costs to a minimum. The long service life of COBRA BC vacuum pumps further reduces the total costs. It is simple and quick to retrofit these screw vacuum pumps into existing systems.

Applications

• High-density plasma CVD (HDP CVD)
• Rapid thermal processing (RTP)
• Sub-atmospheric CVD (SACVD)
• Metal-organic CVD (MOCVD)
• Plasma-enhanced CVD (PECVD)
• Low-pressure CVD (LPCVD)
• Atomic layer deposition (ALD)
• High-capacity load lock