- Advanced Screw Design
low operating costs, minimal maintenance, high uptime
- Short Process Times:
due to high pumping speeds
- Compact Design
COBRA DS 5161/9161 A are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of-the-art COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapor and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
The COBRA DS 5161/9161 A feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.
Equipped with a high-efficiency motor, the COBRA DS 5161/9161 A offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
- High-density plasma CVD (HDP-CVD)
- Rapid thermal processing (RTP)
- Sub-atmospheric CVD (SACVD)
- Metal-organic CVD (MOCVD)
- Plasma-enhanced CVD (PECVD)
- Low-pressure CVD (LPCVD)
- Atomic layer deposition (ALD)