• Efficient:
  cost-effective, long uptime, energy-efficient
• Easy servicing:
  long service intervals
• Reliable:
  operationally reliable
• Flexible:
  application-oriented
• Quiet:
  sound level < 62 dB(A)

The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced cost-of-ownership. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications

• Load lock (conditional)
• Transfer
• Metrology
• Lithography
• Physical Vapor Deposition (PVD)
• Rapid Thermal Annealing (RTA)
• Strip/Ashing
• Oxide Etch
• Silicon Etch
• Metal Etch