Vacuum Valves:

Vacuum valves are used when a vacuum must be maintained in a closed system.
Vacuum Valves: Learn more

Product Name Notes
Easy Close All-Metal Angle Valve -- Series 540 All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends...
All-Metal Angle Valve -- Series 570
All-Metal Angle Valve -- Series 571
All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring...
All-Metal Gate Valve -- Series 481
All-Metal Gate Valve -- Series 482
All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic...
Gate Valve for Gas Analysis w/ Orifice -- Series 010 Analysis of the residual gases at base pressure with the gate valve open. Line of sight between analyzer and process chamber. With bypass valves Pressure reduction of the process gas...
Gate Valve for Gas Analysis with Bypass -- Series 010 Analysis of the residual gases at base pressure with the gate valve open. Very compact. Gate valve: see section «A», Mini UHV gate valves Series 010. Bypass valves exchangeable: type...
Butterfly Valve Control System -- Series 612 Butterfly pressure control valves for downstream applications. Very fast and strong actuator. Powerful integrated controller. Automatic maintenance indication.
Control Gate Valve -- Series 642 Control gate valves with stepper motor for controlling and isolation. A valve in combination with an adaptive pressure controller PM4/5 is a pressure control system.
Control Angle Valve for UF6 -- Series 660 DN 16 - 100. These products are subject to the Non Proliferation Treaty (NPT). Control and leaktight closing. Selection of flow range by replaceable needle/nozzle unit. Increased safety by evacuation...
Angle Valve for Chemistry -- Series 271 DN 25 - 160. These products are subject to the Non Proliferation Treaty (NPT). Body made of aluminum or stainless steel. Bellows feedthrough with additional shaft seal for safety.
Fast Closing Shutter -- Series 771 Fast closing flap shutters for protecting storage rings of synchrotrons and particle accelerators from air inrush. Closing to a small leak in milliseconds. For UHV and extreme UHV systems. Electropneumatic...
Fast Closing Valve -- Series 750 Fast closing flap valve for protecting storage rings of synchrotrons and particle accelerators from air inrush. Leaktight closure within milliseconds. For UHV systems. Electropneumatic actuator designed for smooth closing. Controlled...
Fast Closing Shutter -- Series 773 Fast closing slot shutter for protecting storage rings of synchrotrons and particle accelerators from air inrush. Closing to a small leak in milliseconds. For UHV and extreme UHV systems. Electropneumatic...
Fast Closing Valve -- Series 752 Fast closing valves for protecting storage rings of synchrotrons and particle accelerators from air inrush. Leaktight closure in milliseconds. MONOVAT sealing system. For UHV and extreme UHV systems. Electropneumatic actuator...
HV Angle Valve (DN 100-160) -- Series 263
HV Angle Valve (Electromagn. Actuator) -- Series 264
High vacuum angle valve with bellows feedthrough and large conductance. Features Modular design Robust, compact Easy cleaning
HV Angle Valve (DN 10-80) -- Series 264 High vacuum angle valves with bellows feedthrough. Modular design. Features Modular design Very low outgassing rate due to body machined from extruded aluminum Easy cleaning
HV Inline Valve (Electromagn. Actuator) -- Series 265 High vacuum inline valve with bellows feedthrough and large conductance. Differential pressure resistant
Vacuum Inline Valve (DN 16-100) -- Series 245 Inline valve with shaft feedthrough for large gas flows. Features Modular design Robust, compact Easy cleaning
Insertable Gate Valve -- Series 081 Insertable gate valves are space saving due to direct mounting between DIN flanges. Features Flanges with DIN centering insert VATLOCK configuration
Diaphragm Valve (DN 16-40) -- Series 220 Manually operated diaphragm valves with forged body and robust actuator. Features Diaphragm made of FKM (VITON) Easy replacement of the diaphragm
Mini Gate Valve VATLOCK -- Series 012 Mini vacuum gate valves are small, light-weight and low-priced. Features VATLOCK configuration O-ring shaft seal Vulcanized gate seal
Mini UHV Gate Valve -- Series 010 Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants. Features MONOVAT configuration Bellows-sealed Mechanism free of lubricants
Inline Valve with Soft-Pump Function -- Series 291
Soft-Pump Angle Valve (DN 25-50) -- Series 290
Soft-Pump Angle Valve (DN 63-160) -- Series 290
Offers reduced turbulence during initial pump down giving low particle count. Adjustable soft-pump opening to reduce the turbulences during pump-down and venting
Pendulum Valve Control System -- Series 651 Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at...
Pendulum Valve Control System -- Series 650 Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
RF All-Metal Gate Valve -- Series 472 RF all-metal gate valves with patented VATRING sealing system and RF aperture. Mainly used as sector valves in storage rings of synchrotrons and particle accelerators. Customer-specified RF apertures with low...
RF All-Metal Gate Valve -- Series 471 RF all-metal gate valves with patented VATRING sealing system and RF aperture. Used as sector valves in storage rings of synchrotrons and particle accelerators. Customer-specified RF apertures with low RF...
Soft Start Valve -- Series 311 Soft-start valves consist of two halves of throttle flaps supported on a common axis and maintained in the open position by a spring. The axis is held in an ISO-KF...
HV Inline Valve (DN 16-100) -- Series 265 Standard HV inline valve with bellows feedthrough. For large gas flows we recommend Series 24. Features Modular design Robust, compact Easy cleaning
HV Gate Valve -- Series 091 The HV stainless steel gate valve with bellows is designed for harsh process conditions. The grease free wedge valve design allows multiple differential pressure (1 bar) openings even in a...
Large Transfer Valve MONOVAT -- Series 024 The key features of the MONOVAT valve technology are the proven three-dimensional sealing technology, low particle and shock generation, modular design enables easy up scaling and compact outside dimensions. By...
Transfer Valve SolVat -- Series 066 The key features of the SolVAT technology are the robust mechanism design which can withstand harsh environment, low cost of owner ship and modular design enables easy upscaling. By a...
Transfer Valve XL-VAT -- Series 060 The key features of the XL-VAT technology are the fast and simple maintenance, low cost of ownership, adjustable sealing force on gate seal and modular design enables easy upscaling. By...
New Version Pendulum Valve -- Series 162 The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the...
Control Gate Valve -- Series 640 These control gate valves are available with 3-position pneumatic actuator for throttling and isolation, and with stepper motor for controlling and isolation. A valve in combination with an adaptive pressure...
Gate Valve Particle Free -- Series 150
Gate Valve Particle Free -- Series 151
These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc.
Gate Valve Particle Free -- Series 152 These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc
HV Gate Valve -- Series 140 These HV gate valves are well suited for process systems. Key features are compactness, high cycle life due to the rotary feedthrough, proved VATLOCK sealing principle, six possible actuator positions,...
Large Pendulum Valve -- Series 168 These large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry.
Vacuum Gate Valve -- Series 121 These low-cost gate valves are designed for very easy maintenance. Features High quality shaft feedthrough VATLOCK configuration Low shock during operation
UHV Gate Valve -- Series 108 These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking.
Large Gate Valve (HV) -- Series 190
Large Gate Valve (UHV) -- Series 192
These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features Proved VATLOCK configuration Assembly in cleanroom according to UHV quality...
Transfer Insert MONOVAT Direct -- Series 032 Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top.
Transfer Valve MONOVAT Direct -- Series 022 Transfer valves for load lock / process module isolation. The valves work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance.
Transfer Gate Valve L-VAT -- Series 041 Transfer valves, particularly for aggressive semiconductor processes. Features Reliable single shaft actuator with bellows-sealed feedthrough Mechanically secured L-motion, generated by eccentric cam shaft and pneumatic sequence control Mechanically locked in...
UHV Angle Valve -- Series 284 UHV angle valves. Extremely low outgassing rate. Standard with metal bonnet seal Suited for most corrosive gases
Vacuum Angle Valve (DN 100-160) -- Series 243 Vacuum angle valves with shaft feedthrough. High conductance. Features Modular design Robust, compact Easy cleaning
Vacuum Angle Valve (DN 10-80) -- Series 244 Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design. Angle valve with shaft feedthrough for large gas flows
Vatterfly Valve -- Series 203 Vatterfly valves designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough For contaminating and aggressive applications, mechanism in the actuator Compact alternative to gate...
Vatterfly Valve (Manual Actuator) -- Series 200 Vatterfly valves designed for a high conductance. Manual actuator, with bellows feedthrough Compact alternative to gate valves Only for applications in clean vacuum systems because of exposed valve mechanism
Vatterfly Valve Extended -- Series 204 Vatterfly valves with extended body designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough For contaminating and aggressive applications, mechanism in the actuator Compact...
Vatterfly Valve Extended Body -- Series 202 Vatterfly valves with extended body designed for a high conductance. Manual actuator, with bellows feedthrough Compact alternative to gate valves Only for applications in clean vacuum systems because of exposed...
Beam Stopper -- Series 793 Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stopper without body for direct integration...
Beam Stopper -- Series 790 Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stoppers for protecting experiments from beam...
Butterfly with Sealing Function -- Series 615 Area of application: Semiconductors, FPD and industrial processes, particularly CVD systems. Description: Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable...
HV Gate Valve with Bellows -- Series 110 Area of application: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications Description: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications...