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Digital Mass Flow Controller -- DFC26S-VADN5-C5 -- View Larger Image
Digital Mass Flow Controller -- DFC26S-VADN5-C5-Image

Design Features

  • digital and analog modes operate
  • programmable flow configurations
  • available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
  • maximum pressure of 1000 psig (70 bars)
  • multi-drop capability of up to 256 units
  • stores calibration data for up to 10 gases
  • totalizer indicates total gas quantity
  • alarm limits for high and low gas flow
  • conversion factors for up to 256 gases
  • auto tune function for optimum control response
  • self diagnostic tests

Product Category
Flow Meters
Meter Technology
Physical Specifications
Pipe Diameter
0.12 to 0.38 inch (3.17 to 9.52 mm)
End Fittings
Compression; VCO® / VCR® (optional feature)
Process Operating Conditions
Process Media Type

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Operating Pressure
Meter Type
Flow Performance Range
Gas Volumetric Flow Rate
Output Options
Electrical Output
Interface Options
User Interface
Front Panel Interface
Operating Temperature